High rigidity construction with linear motor movement and high resolution cameras. Combines the optimum placement pressure, high accuracy, and high quality using advanced control technology.
With the assumption that this machine is going to be used in cleanrooms, the XY robot is cleanroom capable.
By setting a HEPA filter, you can achieve an even better environment for semiconductors.
Equipped with a large 15 inch touchscreen panel and graphical interface. The united interface controls both machine and MWU12i operation.
Covers both wafer map data management and format conversion.
※Individual user formats can be supported separately.
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